Applied Surface Science, Vol.420, 868-872, 2017
Nanofabrication of high throughput 30 nm hole 2D arrays by a simple visible laser ablation technique
In this paper, we demonstrate two-dimensional nanohole array substrates prepared using the visible laser ablation technique. We fabricated Au/polymer hybrid thin films where the Au nanoparticles were fixed onto the block copolymer substrate, which was used as the microphase-separated structure. The film was coated with a thin layer of poly(methyl acrylate), and was then irradiated with a nanosecond 532 nm pulsed laser light. The light excited the resonant plasmon absorption band of the Au nanoparticles. The nanoparticles underwent explosive vaporization via a superheated state, resulting in the formation of two-dimensional nanohole arrays on the film surface. The relevant mechanism aspects of the nanohole formation process and the relationship with laser fluence are presented. (C) 2017 Elsevier B.V. All rights reserved.