We report two examples of initiated chemical vapor deposition (iCVD) polymers being developed for use in laser targets for high peak-power laser systems. First, we show that iCVD poly(divinylbenzene) is more photo-oxidatively stable than the plasma polymers currently used in laser targets. Thick layers (10-12 mu pm) of this highly crosslinked polymer can be deposited with near-zero intrinsic film stress. Second, we show that iCVD epoxy polymers can be crosslinked after deposition to form thin adhesive layers for assembling precision laser targets. The bondlines can be made as thin as similar to 1 pm, approximately a factor of 2 thinner than achievable using viscous resin based adhesives. These bonds can withstand downstream coining and stamping processes. (C) 2016 Elsevier B.V. All rights reserved.