The reaction of C6F5H and H2C CHSiMe3 with catalytic [(i)Pr(2)Im]Ni(eta(2)-H2C CHSiMe3)(2) (1b) exclusively forms the C-H silylation product C6F5SiMe3 with ethylene as a byproduct ([(i)Pr(2)Im] = 1,3-di(isopropyl)imidazole-2-ylidene). Catalytic C-H bond silylation is facile with partially fluorinated aromatic substrates containing two ortho fluorine substituents adjacent to the C-H bond and 1,2,3,4-tetrafluorobenzene. Less fluorinated substrates react slower. Under the same reaction conditions, catalytic [IPr]Ni(eta(2)-H2C=CHSiMe3)(2) (1a) ([IPr] = 1,3-bis [2,6-diisopropylphenyl]-1,3-dihydro-2H-imidazol-2-ylidene) provided only the alkene hydroarylation product C6F5CH2CH2SiMe3. Mechanistic studies reveal that the C-H activation and beta-Si elimination steps are reversible under catalytic conditions with both catalysts la and 1b. With catalytic la, reversible ethylene loss after beta-Si elimination was also observed despite its inability to catalyze C-H silylation; the reductive elimination step to form the silylation product is much slower than reductive elimination to form the alkene hydroarylation product. Reversible ethylene loss was not observed with 1b, which suggests that the rate-limiting step in the reaction is neither C-H activation nor beta-Si elimination but either ethylene loss or reductive elimination of cis-disposed aryl and SiMe3 moieties.