화학공학소재연구정보센터
Journal of Crystal Growth, Vol.468, 671-675, 2017
Growth of ZnMgSeTe nearly lattice-matched to ZnTe and p-type doping by low-pressure MOVPE
Zn1-xMgxSeyTe1-y layers have been grown on (100) ZnTe substrates by low-pressure metalorganic vapor phase epitaxy using dimethylzinc, bis-methylcyclopentadienyl magnesium ((MeCp)(2)Mg), diethylselenide and diethyltelluride as source materials. The Mg mole fraction of Zn1-xMgxSeyTe1-y layer can be controlled successfully by varying (MeCp)(2)Mg transport rate. P-type doping of this material has been tried using tris-dimethylaminophosphorus as a dopant source. The influence of annealing temperature or dopant transport rate upon the electrical property has been investigated. All the layers show p-type conduction even without annealing. Through this study, a maximum carrier concentration of 2.5x10(18) cm(-3) is obtained.