Nanometer and sub-micrometer particle coatings are generated via a solution-precursor high-velocity oxygen fuel spray (SP-HVOFS) process. The zirconium nitrate (Zr-N) pentahydrate [Zr(NO3)(4)center dot 5H(2)O] precursor was used with varied precursor concentrations, solvent types, and injection nozzles for analyzing the effects over the nanomemter and sub-micrometer particle coating formations. The solvent types are pure water, water-ethanol mixture, and pure ethanol, whereas injection types are plain-orifice; angular, and effervescent injections. Various nanometer and sub-micrometer particle size distributions and morphologies are analyzed for varied precursor concentrations, solvent types, and injection nozzles by using scanning electron microscopy (SEM) of sprayed substrates. The particle at low precursor concentration showed spherical morphology with narrow size distribution, whereas at higher concentrations irregularly shaped agglomerated and large particle are observed. Moreover, the mixtures of aqueous-organic and pure organic-hased solvents are preferred to improve the SP-HVOFS process efficiency to generate small size and homogeneous nanometer and sub-micrometer particles. Toward the variation in injection nozzles, when different types of injection nozzles were tested,, the effervescent-type atomization nozzle produced the best-quality nanometer and sub-micrometer particles.