Biocompatible Diamond-Like Carbon (DLC) films were prepared by Pulsed Laser Deposition technique using the laser energy density of 10 J cm(-2) on the graphite target. The surface of the grown film was modified during the deposition by bombardment with argon, xenon, nitrogen or oxygen ions. The ion energy (up to 150 eV) was changed by gun voltage and by ionic current. The films with high and low diamond/graphite content were prepared. Physical and mechanical properties of biocompatible DLC thin layers prepared by hybrid laser technology were studied. The composition of layers and the content trace elements were determined by the methods of Rutherford Backscattering Spectrometry and Particle Induced X-ray Emission. The content of sp(2) and sp(3) bonds was measured using X-ray Photoelectron Spectroscopy. For different energy of argon and oxygen ions the maximum of sp(3) bonds content was found (83.63% of sp(3) bonds for argon ions). All films were smooth, which was confirmed by profilometry and Atomic Force Microscopy measurements. Maximum roughness Ra and RMS was did not exceed 1 nm. The Youngis and shear moduli were studied by Resonant Ultrasound Spectroscopy. The Young's Modulus attained the value of 601 GPa and the shear Modulus attained the value of 253 GPa at the energy of 30 eV of Ar ions. The influence of ion bombardment on DLC film properties is discussed. (C) 2017 Elsevier B.V. All rights reserved.