The well-reproducible, fast and cost-effective nanostructuring is a big challenge for laser methods. The laser nanostructuring of fused silica assisted by chromium nanotriangles was studied using a KrF excimer laser (lambda = 248 nm, Delta t(p) = 25 ns, top hat beam profile). Therefore, a fused silica substrate was covered with periodically ordered polystyrene (PS) spheres with a diameter of 1.59 mu m. Subsequently, this system was covered with 30 nm chromium by electron beam evaporation. Afterwards the PS spheres were removed and the bare and resultant periodic Cr triangles were irradiated. The laser irradiation with high laser fluences resulted in a removal of the chromium and in localized modifications of the fused silica like a localized ablation of the fused silica. The resultant structures were studied by scanning electron (SEM) and atomic force microscopy (AFM) as well as the surface composition was analysed by energy-dispersive Xray spectroscopy (EDX). The laser process allows the production of well-defined periodic hole structures into the fused silica surface where the resultant surface structure depends on the laser parameters. The multi-pulse irradiation of the Cr/SiO2 sample with moderate laser fluences (Phi similar to 650 mJ/cm2()) allows the fabrication of periodic pyramidal -like structures (depth Delta z = 130 nm). (C) 2016 Elsevier B.V. All rights reserved.