High-voltage etched aluminum foils were coated with BaTiO3 (BT) films by vacuum infiltration using a sol. The specimens coated with the BT films were annealed at 450-550 degrees C for 10-90 min, and this procedure was repeated several times (n = 0, 1, 2, 4, and 8 cycles), after which the specimens were finally anodized at 100-500 V. The BT films coated on the high-voltage etched aluminum foils were crystallized when annealed at 550 degrees C for 30 min. The thickness of the BT-coated layer decreased after the anodization, proving that the BT-coated layers were decomposed by the anodization, likely contributing to the formation of a BT-Al2O3 (BT-Al) composite oxide layer between the inner BT-coated layer and the outer Al2O3 layer. The maximum specific capacitance (C-S) of the specimens was obtained after 4 cycles of BT coating. The specific capacitances of the BT-coated specimens were higher than those of the specimens without the BT-film coating. The withstanding voltages of the specimens were approximately 123, 330, and 545 V when the specimens were anodized at 100, 300, and 500 V, respectively. These results suggest the successful fabrication of BT-Al composite oxide films on high-voltage etched aluminum foils. (C) 2016 Elsevier B.V. All rights reserved.