Harnessing cathodic hydrogen atom generation, metals such as Pt, Pd, Cu, Au and Ni are directly electrodeposited on functionalized dielectric layers of 6 nm thick silicon oxide formed by thermal oxidation of c-Si substrate. Modifying the oxide layer with functional molecules and Au nanoparticles by simple wet chemistry, we can enhance electrodeposition efficiently and thereby electroplate nanoparticles of Pd and Pt to obtain such thin metal films. In particular, Au nanoparticles on amine-modified silicon oxides remarkably enhance electrodeposition of metal nanoparticles to create sturdy metal films on the dielectric layer, n(+)-Si/SiO2-NH2. Such enhancement is ascribed to good affinity of Au nanoparticles with electrodeposited metal as well as enhanced current density across the silicon oxide. For an example of potential applications, we show one-step electrodeposition Pd film on dielectric layers to fabricate conductometric hydrogen gas sensor without transferring Pd film. (C) The Author(s) 2016. Published by ECS. All rights reserved.