Recently, in the electronics and pharmaceutical industries, miniature devices that can transport a tiny amount of dry powder with a particle size of 100 pm or less are desired. We therefore focused on a surface acoustic wave (SAW) device, and we experimentally studied an interdigital transducer (IDT) that generates the SAW. As a result, it was found that an IDT with a 2-mm pitch size at a 90 inclination angle, against the perpendicular direction of a piezoelectric wafer (127.8 y-rotated x-propagating LiNbO3) orientation flat, had a high efficiency of copper powder (about 100-mu m particle size) transport. Then, to investigate the availability of a SAW actuator with this highly efficient IDT, we fabricated a miniature feeder (13-mm height x 18-mm width x 78-mm length) mounted with a hopper on the SAW actuator and carried out a powder supply experiment. As a result, it was found that, when 1 W of electric power was applied to the IDT of the feeder, the powder supply capability of the feeder was about 18 mg/s. From this fact, it was experimentally shown that a SAW actuator with a highly efficient IDT has a great potential to control dry powder with superior accuracy. (C) 2016 The Society of Powder Technology Japan. Published by Elsevier B.V. and The Society of Powder Technology Japan. All rights reserved.