화학공학소재연구정보센터
Thin Solid Films, Vol.621, 58-62, 2017
Vacuum-ultraviolet ellipsometry spectra and optical properties of Ba(Zr,Ti)O-3 films
In this work, we determine the dielectric functions of multi-target, reactively sputtered Ba(Zr0.2Ti0.8)O-3 by spectroscopic ellipsometry in the photon energy range from 0.8 to 8.7 eV. Based on this data, we discuss the interband transition energies and the spectral dependencies of the refractive index and the absorption coefficient. (C) 2016 Elsevier B.V. All rights reserved.