화학공학소재연구정보센터
Applied Surface Science, Vol.395, 145-149, 2017
Photonic devices prepared by embossing in PDMS
In this paper, we present useful technique for fabrication of novel photonic devices created in the polydimethylsiloxane (PDMS). We use combination of direct laser writing in thin photoresist layer with embossing process of liquid PDMS. We prepared ring resonator and Mach-Zehnder interferometer in PDMS. The shape of prepared PDMS photonic devices was analyzed by confocal laser microscope and atomic force microscope. Optical characterization of these devices reveals extinction ratios of up to 20 dB. (C) 2016 Elsevier B.V. All rights reserved.