Fe-doped copper chromium oxide (CuCr1- xFexO2) thin films were prepared on non-alkali glass substrates by chemical solution deposition. The effects of the ambient gas and temperature annealing conditions were investigated in order to produce pure CuCrO2 phase thin films at a relatively lower process temperature. A single-phase delafossite CuCrO2 structure was obtained by two-step annealing method. The transmittance of the CuCrO2 thin films was above 65% in the visible region, and the band gap was estimated as 3.1 eV. The electrical and magnetic properties are also reported. (C) 2016 Elsevier B.V. All rights reserved.