We report on highly oriented growth of VO2(B) thin films on Mo foils by reactive sputtering and its performance as an cathode electrode material in lithium ion batteries. Reactively sputtered films under moderate 02 flow and substrate temperature revealed (001)-oriented growth on the poly-crystalline Mo foils with electrically floating potential. It can be interpreted that the oriented VO2(B) film can grow on Mo substrates under narrow condition in which ions with restricted energies result in crystalline lattice formation with moderate substrate temperature. The lithium ion battery utilizing the VO2(B) film on Mo foil as cathode electrode revealed specific capacity of 110 mAhg(-1) at 2.0 V. Repeated charge/discharge experiments indicated that the oriented VO2(B) film, in which VO6 octahedra pile up with vacant cites of 0 atoms orderly that can act as spaces for Li intercalation and de-intercalation, has certain potential as cathode material. (C) 2016 Elsevier B.V. All rights reserved.