In order to utilize silicon wafer as electrode and substrate for integrated lithium-ion batteries, a composite film with in-situ formed porosity (lithium phosphorous oxynitride/tin oxide, LiPON/SnO2) is fabricated and directly exploited as the artificial solid electrolyte interphase film. Without the compromise of Coulombic efficiency, the capacity and cycle performance of silicon wafer are both developed, resulting from the reduced resistance and the dynamically stable coating. This work provides guidance to enhance the lithiation of bulk silicon, and the strategy of surface modification can be applied to other advanced materials or fields. (C) 2016 Elsevier B.V. All rights reserved.