화학공학소재연구정보센터
Applied Surface Science, Vol.390, 43-49, 2016
Morphology and structural studies of WO3 films deposited on SrTiO3 by pulsed laser deposition
WO3 films have been grown by pulsed laser deposition on SrTiO3 (001) substrates. The effects of substrate temperature, oxygen partial pressure and energy fluence of the laser beam on the physical properties of the films were studied. Reflection high-energy electron diffraction (RHEED) patterns during and after growth were used to determine the surface structure and morphology. The chemical composition and crystalline phases were obtained by XPS and XRD respectively. AFM results showed that the roughness and skewness of the films depend on the substrate temperature during deposition. Optimal conditions were determined for the growth of the highly oriented films. (C) 2016 Elsevier B.V. All rights reserved.