We used atomic force microscopy (AFM) to study surface morphology and kinetic roughening of Ag films. X-ray diffraction (XRD) technique is used to verify the films crystalline structure. The influence of film thickness on the kinetic roughening was investigated using AFM data and roughness calculation. It is revealed that the surface roughness increases with increasing the film thickness. The data also consist with a complex behavior which is called as anomalous scaling. Scaling laws analysis for Ag films presents two distinct dynamics including large local and scale roughness and indicates a power law dependency on the thickness of film. AFM images have been characterized by the multifractal analysis. This analysis shows that the self similar and multifractal characteristics as well as anomalous scaling exist in the Ag film morphologies. Description of the quantitative growth and surface morphology was done by the multifractal spectra, f (alpha) - alpha. It is found that the multifractal spectrum shape is left hook-like (that is difference of height interval of the multifractal spectrum, Delta f = f (alpha(min)) - f(alpha(max)) > 0). The results indicate that the surfaces having greater roughness give rise the wider multifractal spectrum width(Delta alpha) and the greater Delta f, thus, the nonuniformity of the height probabilities becomes larger. It indicates that the multifractality of the films becomes more pronounced at the higher thickness. (C) 2016 Elsevier B.V. All rights reserved.