Quantitative analysis of Co and Fe using X-ray photoelectron spectroscopy (XPS) is of important for the evaluation of the catalytic ability of Co-substituted magnetite. However, the overlap of XPS peaks and Auger peaks for Co and Fe complicate quantification. In this study, non-linear least squares fitting (NLLSF) was used to calculate the relative Co and Fe contents of a series of synthesized Co-substituted magnetite samples with different Co doping levels. NLLSF separated the XPS peaks of Co 2p and Fe 2p from the Auger peaks of Fe and Co, respectively. Compared with a control group without fitting, the accuracy of quantification of Co and Fe was greatly improved after elimination by NLLSF of the disturbance of Auger peaks. A catalysis study confirmed that the catalytic activity of magnetite was enhanced with the increase of Co substitution. This study confirms the effectiveness and accuracy of the NLLSF method in XPS quantitative calculation of Fe and Co coexisting in a material. (C) 2016 Elsevier B.V. All rights reserved.