Angle-resolved thickness and compositional analyses of BaTiO3, CaTiO3, La0.4Ca0.6MnO3, EuAlO3, and LiMn2O4 were performed to study the influence of the background gas pressure when depositing multi elemental oxide materials. With increasing gas pressure the typical forward directed deposition changes to a constant thickness at all angles. Compositional changes with respect to the target show dependencies on (in order of influence): target material, deposition pressure, and angular location (substrate size). A linear relationship was found between target mass-ratios and compositional deviations. This can lead to compositional deviations of up to 70% for large mass-ratios in certain pressure regimes. (C) 2016 Elsevier B.V. All rights reserved.