Surface characterization of diamond film tool on the monocrystal sapphire under H2O, 3% ethylene glycol and 3% ethylenediamine was investigated. The typical components and chemical changes of the surface of diamond thick film were studied by means of Raman and XPS. Results showed that tribological properties of diamond film tool were associated with the liquid environment located the grinding. Diamond film tool under 3% ethylenediamine solution exhibited the minimum value of friction coefficient, while that under H2O exhibited maximum value of friction coefficient. As the ethylenediamine and ethylene glycol were added during the grinding process, the reaction between diamond film and the sapphire pieces occurred, and the chemical composition change of the surface was also studied. Under the same process parameters, a better surface quality of sapphire under the grinding fluid of ethylenediamine can be obtained. (C) 2016 Elsevier B.V. All rights reserved.