Rapidly growing interest and demand for wearable electronics require the development of flexible and lightweight all-solid-state batteries as power sources that guarantee high performance and safety with the absence of the risk of fire or explosion that can occur with traditional liquid electrolyte systems. Herein, we successfully fabricate new flexible all-solid-state microbatteries integrating a solid electrolyte film of lithium boron oxynitride (LiBON) on a flexible substrate using sophisticated thin-film fabrication technology. The new microbattery of Li/LiBON/LiCoO2 exhibits excellent mechanical integrity even under severe bending and twisting test conditions, enabling the realization of flexible microbatteries. The microbatteries demonstrate superior electrochemical cycling stability relative to conventional batteries, delivering an outstanding capacity retention of 90% on the 1000th cycle. Furthermore, operation at various temperatures from -10 degrees C to +60 degrees C and fast charging within 3-6 min are achieved. With various types of flexible substrates, the microbatteries can provide diverse opportunities for flexible and wearable electronics. (C) 2016 Elsevier B.V. All rights reserved.