A comparison of measurements performed in in-situ conditions using Raman spectroscopy and Deflection Test in Monofacial Oxidation techniques were employed to study stress states developed in zirconia films grown at 500 degrees C is presented. The results show a good correlation between recorded Raman peak displacement and sample deflection angle. Considering analyzed volume of the material, Raman analysis represents a local measurement while the deflection test is a global response of the material. Reported stress components: (i) hydrostatic resulted from Raman spectroscopy and (ii) in-plane resulted from deflection test technique have been analyzed in comparison to each of the described techniques and aim to explain the behavior of zirconia at high temperatures. (C) 2016 Elsevier B.V. All rights reserved.