We report the effect of post deposition annealing temperature (T-a = 550 and 750 degrees C) on the surface morphology, chemical bonding and structural development of lanthanum doped lead zirconate titanate (Pb0.95La0.05Zr0.54Ti0.46O3; referred to PLZT) thin films prepared using chemical solution deposition method. Atomic force microscopy demonstrates formation of nanocrystallites in the film annealed at T-a =750 degrees C. X-ray photoelectron spectroscopy (XPS) analyses indicate that the binding energies (BE) of the Pb 4f, Zr 3d, and Ti 2p doublet experience a positive energy shift at T-a = 750 degrees C, whereas the BE of 0 1s and L-a 3d doublet show a negative shift with respect to the BE of the films annealed at T-a = 750 degrees C. Thermal induced crystallization and chemical modification is evident from XPS results. The Ar+ sputtering of the films reveals change in oxidation state and chemical bonding between the constituent atoms, with respect to T-a. Raman spectroscopy used to study phonon-light interactions show shift in longitudinal and transverse optical modes with the change in T-a, confirming the change in phase and crystallinity of these films. The results suggest annealing at T-a = 750 degrees C yield crystalline perovskite PLZT films, which is essential to obtain photovoltaic response from devices based on such films. (C) 2016 Elsevier B.V. All rights reserved.