CrSiC coatings with different silicon contents were prepared using unbalanced magnetron sputtering via adjusting trimethylsilane (Si(CH3)(3)H) flows. Their phase structure, bonding structure, microstructure and hardness were characterized by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS), a field emission scanning electron microscope (FESEM) and nano-indenter, respectively. The tribological properties of CrSiC coatings sliding against SiC and Al2O3 balls were investigated in water. The results showed that the CrSiC coatings were speculated to be X-ray amorphous. Although the hardness of coatings fluctuated slightly (13.2-13.8 GPa), the coatings showed poor wear resistance due to the decline of the crack resistance and toughness. Moreover, the friction coefficient (0.24-0.31) and the wear rate (2.97-7.66 x 10(-6) mm(3)/Nm) of CrSiC/SiC trobopairs were lower than those of CrSiC/Al2O3 tribopairs. (C) 2016 Elsevier B.V. All rights reserved.