Photolysis of a self-assembled monolayer (SAM) formed with a silane coupling agent bearing a photocleavable 2-nitrobenzyl carbamate moiety afforded a surface that could be subsequently remodified. Based on this finding, we fabricated a bifunctional surface by modification of photopatterned SAM with another silane coupling agent containing a 2-nitrobenzyl ester or an organic semiconductor moiety; the latter afforded an organic semiconductor layer with a 50 x 50 mu m square pattern.