Isothermal (vapour + liquid) equilibrium data were obtained for potentially hazardous binary mixtures of (dichlorosilane + trichlorosilane), (dichlorosilane + tetrachlorosilane), and (trichlorosilane + tetrachlorosilane) using an apparatus based on the "static-analytic" method. The apparatus was specially developed and designed to ensure safe measurement of the flammable, toxic, and corrosive components. The (dichlorosilane + trichlorosilane) system was measured at T = (343.04, 353.04 and 363.00) K, and the (dichlorosilane + tetrachlorosilane) system at T = (343.28 and 353.07) K, and the (trichlorosilane + tetrachlorosilane) system at T = (323.17, 333.11 and 343.03) K. The resulting data were correlated with the Peng-Robinson equation of state coupled with the Wong Sandler mixing rule. The model provided accurate description of all isotherms of the binary systems using temperature-independent interaction parameters regressed for all isotherms. (C) 2015 Elsevier Ltd. All rights reserved.