Arrays with hemispherical dots were produced from nanoimprinted line structures by thermal reflow and coagulation. By adding local nodes into 100 nm wide line cavities of the nanoimprint stamp, the coagulation was controlled and a self-ordered, highly regular dot matrix with almost totally dewetted lines was obtained. The forming of dots of almost equal sizes and distances along the line's location shows that this coagulation effect is probably only restricted by geometry and surface energy. Simple resist preforms can be transformed into a more complex pattern by thermal-postprocessing in a controlled way. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3498762]