Latent variable (LV) models provide explicit representations of underlying driving forces of process variations and retain the dominant information of process data. In this study, slow features (SFs) as temporally correlated LVs are derived using probabilistic SF analysis. SFs evolving in a state-space form effectively represent nominal variations of processes, some of which are potentially correlated to quality variables and hence help improving the prediction performance of soft sensors. An efficient expectation maximum algorithm is proposed to estimate parameters of the probabilistic model, which turns out to be suitable for analyzing massive process data. Two criteria are also proposed to select quality-relevant SFs. The validity and advantages of the proposed method are demonstrated via two case studies. (c) 2015 American Institute of Chemical Engineers