This paper describes the use of microcontact printing (mu CP) for patterning of self-assembledm onolayers (SAMs) of (3-aminopropyl)-triethoxysilane (APTES) and octadecyltrichloro silane (OTS) on the surface of glass and functionalization of alkylsilane monolayers. After activation of the glass surface, which was patterned wit h OTS using a poly(dimethylsiloxane) (PDMS) stamp, the remaining bars of the surfaces were treated with APTES and then treated with a dye solution. The characterization of printed silane compounds was confirmed using fluorescence microscopy on the basis of the reaction between terminal amine groups of APTES and thionylchloride of Rhodamine-B dye. Quantitative 3-dimensional pro. ling was performed for the whole modi. cation process by converting of microscopic images to numerical dimensions.