Korean Journal of Materials Research, Vol.26, No.2, 84-89, February, 2016
스핀코팅법으로 제작한 산화아연/산화구리 이종접합의 정류 및 일산화질소 가스 감지 특성
Rectifying and Nitrogen Monoxide Gas Sensing Properties of a Spin-Coated ZnO/CuO Heterojunction
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We present the rectifying and nitrogen monoxide (NO) gas sensing properties of an oxide semiconductor heterostructure composed of n-type zinc oxide (ZnO) and p-type copper oxide thin layers. A CuO thin layer was first formed on an indium-tin-oxide-coated glass substrate by sol-gel spin coating method using copper acetate monohydrate and diethanolamine as precursors; then, to form a p-n oxide heterostructure, a ZnO thin layer was spin-coated on the CuO layer using copper zinc dihydrate and diethanolamine. The crystalline structures and microstructures of the heterojunction materials were examined using X-ray diffraction and scanning electron microscopy. The observed current-voltage characteristics of the p-n oxide heterostructure showed a non-linear diode-like rectifying behavior at various temperatures ranging from room temperature to 200 ℃. When the spin-coated ZnO/CuO heterojunction was exposed to the acceptor gas NO in dry air, a significant increase in the forward diode current of the p-n junction was observed. It was found that the NO gas response of the ZnO/CuO heterostructure exhibited a maximum value at an operating temperature as low as 100 ℃ and increased gradually with increasing of the NO gas concentration up to 30 ppm. The experimental results indicate that the spin-coated ZnO/CuO heterojunction structure has significant potential applications for gas sensors and other oxide electronics.
- Fine GF, Cavanagh LM, Afonja A, Bibions R, Sensors, 10, 5469 (2010)
- Yamazoe N, Miura N, Sens. Actuators B-Chem., 20, 95 (1994)
- Min Y, Tuller HL, Palzer S, Wollenstein J, Bottner H, Sens. Actuators B-Chem., 93, 435 (2003)
- Gao T, Wang TH, Appl. Phys. A-Mater. Sci. Process., 80, 1451 (2005)
- Baruah S, Dutta J, Sci. Technol. Adv. Mater., 10, 013001 (2009)
- Chen CH, Chang SJ, Chang SP, Li MJ, Chen IC, Hsueh TJ, Hsu CL, Chem. Phys. Lett., 476(1-3), 69 (2009)
- Maridha S, Basak D, Semicond. Sci. Technol., 21, 928 (2006)
- Luther JM, Gao JB, Lloyd MT, Semonin OE, Beard MC, Nozik AJ, Adv. Mater., 22(33), 3704 (2010)
- El-Trass A, ElShamy H, El-Mehasseb I, El-Kemary M, Appl. Surf. Sci., 258(7), 2997 (2012)
- Kidowaki H, Oku T, Akiyama T, J. Phys. Conf. Ser., 352, 012022 (2012)
- Hoa LT, Hur SH, Phys. Status Solidi A-Appl. Res., 210, 1213 (2013)
- Sze SM, Ng KK, Physics of Semiconductor Devices, 3rd ed., Wiley, New York (2007), p. 790.
- Sah C, Noyce RN, Shockley W, Proc. IRE, 45, 1228 (1957)
- Chen XD, Ling CC, Fung S, Beling CD, Mai YF, Fu RKY, Siu GC, Chu PK, Appl. Phys. Lett., 88, 132104 (2006)
- Luo Z, Hao JH, Gao J, Appl. Phys. Lett., 91, 062105 (2007)
- Scott RWJ, Yang SM, Chabanis G, Coombs N, Williams DE, Ozin GA, Adv. Mater., 13(19), 1468 (2001)
- Park SJ, Kim H, Kim D, Korean J. Mater. Res., 24(1), 19 (2014)
- Naisbitt SC, Pratt KFE, Williams DE, Parkin IP, Sens. Actuators B-Chem., 114, 969 (2006)
- Ahlers S, Muller G, Doll T, Encyclopedia of Sensors, p. 413, ed. by Grimes CA, Dickey EC, Pishko MV, American Scientific Publishers (2006).