Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.16, No.5, 412-415, 1997 DOI10.1023/A:1018575201754 Export Citation Hybrid Plasma Chemical-Vapor-Deposition of Aluminum Nitride from Al and NH3/N-2 Mixtures Ahmed W, Tither D Please enable JavaScript to view the comments powered by Disqus.
