Nanoscale grating patterns coated indium-tin-oxide (ITO) layers were fabricated using the ultraviolet (UV) nano-imprinting technique. The nanoscale groove coated ITO that was prepared in this experiment could play a role in alignment layers and conducting electrodes. Performance for LC alignment was characterized by evaluating order parameter. The LC order parameter evaluated on the fabricated layer was comparable to that of the conventional rubbed polyimide layer. We also confirmed that the 90 degrees twisted nematic liquid crystal (TNLC) cell with our nanopattern coated ITO layer exhibited stable electro-optical performance.