Molecular Crystals and Liquid Crystals, Vol.464, 743-749, 2007
Direct drawing of submicrom wiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles
The direct- drawing of submicron Ag wiring was achieved by laser- induced pyrolysis ( LIP) of a precursor film prepared from liquid-dispersed Ag nanoparticles. This new method provided the micro-wiring by wet and maskless process toward printed electronics. The linewith of the Ag wiring was easily controlled by changing the objective lens magnifications and the focusing point. The resistivity of the Ag wiring fabricated by this technique ( 1.9 x 10(-6) Omega cm) is comparable with that of bulk Ag ( 1.6 x 10(-6) Omega cm).
Keywords:laser-direct drawing;laser-induced pyrolysis;liquid-dispersed metal nanoparticle;micro-wiring;nanometalink