Aromatic thiol such as a 4'-mercapto-biphenyl-4-carboxylic acid was synthesized, and then the self-assembled monolayer (SAM) was fabricated on a gold substrate. The pattern formation of biphenyl thiol and alkanethiol SAMs was obtained by oxidation reaction due to the irradiation of deep UV light. The resulting positive pattern image and current-voltage (I-V) characteristics of biphenyl thiol and alkanethiols were investigated through the measurements of Atomic Force Microscope (AFM) and Scanning Tunneling Microscope (STM). In addition, cytochrome c protein was immobilized onto the patterned gold substrate by self-assembly technique and electrochemical activity was studied with a cyclic voltammetry.