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Thin Solid Films, Vol.598, 315-334, 2016
Atmospheric pressure plasmas for surface modification of flexible and printed electronic devices: A review
Recently, non-equilibrium atmospheric pressure plasma, especially those operated at low gas temperatures, have become a topic of great interest for the processing of flexible and printed electronic devices due to several benefits such as the reduction of process and reactor costs, the employment of easy-to-handle apparatuses and the easier integration into continuous production lines. In this review, several types of typical atmospheric pressure plasma sources have been addressed, and the processes including surface treatment, texturing and sintering for application to flexible and printed electronic devices have been discussed. (C) 2015 Elsevier B.V. All rights reserved.
Keywords:Atmospheric pressure plasma;Flexible electronic devices;Surface activation and treatment surface texturing;Sintering