The decomposition efficiencies of B2H6 and H3NBH3 activated on hot wire surfaces were measured mass spectrometrically. The decomposition efficiency of B2H6 increased with the residence time of gases in the chamber, and decreased with total pressure when He was added. Decomposition efficiency was still high even under collision-free conditions. These results suggest that the decomposition is not thermal but catalytic, at least at low pressures, although the wire-material dependence of the decomposition efficiency was minor. The decomposition efficiency of H3NBH3 vapor was higher than that of B2H6 and increased with the addition of H-2. H-2, NH3, and N-2 as well as H2NBH2 were identified as stable decomposition products. These results indicate H3NBH3 is a viable candidate as a safe dopant precursor for B-atom doping. (C) 2015 Elsevier B.V. All rights reserved.