Chemically inert coatings on Havar (R) entrance foils of the targets for [F-18] production via proton irradiation of enriched water at pressurized conditions are needed to decrease the amount of ionic contaminants released from Havar (R). During current investigation, magnetron sputtered niobium and niobium oxide were chosen as the candidates for protective coatings because of their superior chemical resistance. Aluminated quartz substrates allowed us to verify the protection efficiency of the desirable coatings as diffusion barriers. Two modeling corrosion tests based on the extreme susceptibility of aluminum to liquid gallium and acid corrosion were applied. As far as niobium coatings obtained by magnetron sputtering are columnar, the grain boundaries provide a fast diffusion path for active species of corrosive media to penetrate and to corrode the substrate. Amorphous niobium oxide films obtained by reactive magnetron sputtering showed superior barrier properties according to the corrosion tests performed. In order to prevent degrading of brittle niobium oxide at high pressures, multilayers combining high ductility of niobium with superior diffusion barrier efficiency of niobium oxide were proposed. The intercalation of niobium oxide interlayers was proved to interrupt the columnar grain growth of niobium during sputtering, resulting in improved diffusion barrier efficiency of obtained multilayers. The thin layer multilayer coating architecture with 70 nm bi-layer thickness was found preferential because of higher thermal stability. (C) 2015 The Authors. Published by Elsevier B.V.