The super-hydrophobic nano-films were synthesized by atmospheric pressure plasma jet using hexamethyldisilazane. In this paper, the atmospheric pressure plasma jet reacting with air was used to determine the formation of plasma polymerized nano-film. The atmospheric pressure plasma polymerized nano-film surface properties were determined by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, scanning electron microscopy and atomic forced microscopy. Specifically, it has been observed that atmospheric pressure plasma polymerization with the appropriate monomer gas flow rate cause the formation of the super-hydrophobic film. The surface properties of atmospheric pressure plasma polymerized nano-films were determined as the Cassie-Baxter state. It was examined that super-hydrophobic nano-film surface exhibits the organosilicon sphere stacking structure. Such sphere stacking structure does not only cause the hydrophobicity, it also stabilizes the Cassie regime, and thus favors the water repellency.