Hydrogen sensor based on nanoporous palladium film with a short response time at room temperature has been investigated. Nanoporous palladium film was deposited on treated porous anodic aluminum oxide template by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensor depending on different post-deposition annealing temperatures ranging from 150 to 400 A degrees C. In this sensor, we obtained a sensor response time as short as 30 s at 1 % hydrogen concentration with an anneal temperature of 200 A degrees C. The sensor exhibited good performance under hydrogen concentrations from 0.1 to 1 %.