화학공학소재연구정보센터
Journal of Crystal Growth, Vol.437, 1-5, 2016
Direct MOVPE growth of semipolar (1122) AlxGa1-xN across the alloy composition range
We report a simple direct route for the synthesis of high-quality semipolar (11 (2) over bar2) AlGaN alloys across the composition range by metalorganic vapour phase epitaxy. We show that a single high-temperature growth step without the use of a low-temperature nucleation or buffer layer is a convenient way to grow high-quality (11 (2) over bar2) AlGaN layers on m-plane sapphire substrate. We also report a detailed investigation of the microstructure and optical properties of these layers including phase-purity, surface morphology, epilayer tilt, and polarization-resolved optical transmission measurements. (C) 2015 Elsevier B.V. All rights reserved.