화학공학소재연구정보센터
Journal of Crystal Growth, Vol.421, 19-22, 2015
Epitaxial properties of ZnO thin films on LaAlO3 substrates by pulsed laser deposition
Wurtzite ZnO thin films with different epitaxial relationships have been grown on (0 0 1), (011)-, and (1 1 1)LaAlO3 (LAO) single-crystal substrates by pulsed laser deposition. Nonpolar (1 1 (2) over bar 0)ZnO films with two orthogonal domains were obtained on (0 0 1) LAO, in which the in-plane orientation relationship is demonstrated to be < 0 0 0 1 >(Zno)//< 1 1 0 >(LAO). For ZnO on (0 1 1)- and (1 1 1)LAO substrates, a single-domain epitaxy with c axial orientation is observed, in which the in-plane relationships were < 1 (1) over bar 0 0 >(ZnO)//< 0 1 (1) over bar >(LAO) irrespective of the substrate orientations. Based On the in-plane orientation relationship, the lattice mismatch has been obtained for these three oriented ZnO/LAO heterointerfaces. (C) 2015 Published by Elsevier B.V.