화학공학소재연구정보센터
Journal of Materials Science, Vol.31, No.19, 5159-5161, 1996
Effects of Oxide Additives on Sheet Resistance of W Thick-Film Conductor
A multilayer AIN-W cofired body has been developed using the pressless sintering technique. Effects of additives, such as Y2O3, CaO, La2O3, MgO, Al2O3 and SiO2, on the sheet resistance of W conductor were studied. The sheet resistance of the W conductor increases with increasing additives in the W paste. However, the oxides can be divided into two groups. The effect of the first group on sheet resistance is different from that of the second group.