화학공학소재연구정보센터
Journal of Materials Science, Vol.30, No.18, 4751-4760, 1995
Synthesis of Fluorinated Diamond Films Using a Laser Technique
A laser chemical vapour deposition process for growing fluorinated diamond thin films on two bearing materials, SiC and 440 C stainless steel, is described. The type of laser, carbon feedstock, laser-precursor gas interactions, and deposition conditions have been established. Raman spectroscopy analysis revealed that the films’ deposited on SiC consisted of a mixture of diamond and graphite, while the films on 440 C steel were composed of diamond, diamond-like carbon and graphite. The feasibility of diamond formation using laser light-gas interactions is explained.