화학공학소재연구정보센터
Journal of Materials Science, Vol.29, No.6, 1680-1685, 1994
Synthesis of Silicon Oxynitride from a Polymeric Precursor .2. The Formation of Trimethylcyclotrisilazane and Tetramethylcyclotetrasilazane from the Ammonolysis of Dichloromethylsilane in Diethyl-Ether
Proton nuclear magnetic resonance (H-1 NMR) spectroscopy, Fourier transform infrared (FT-IR) spectroscopy and gas chromatography (GC) have been used to study the products of ammonolysis of dichloromethylsilane in diethyl ether at 0 degrees C. Results indicate that the major products are trimethylcyclotrisilazane and tetramethylcyclotetrasilazane. Hydrolysis of the cyclosilazanes has also been qualitatively investigated. A simple and useful method for the identification of cyclosilazanes has been developed using the H-1 NMR technique.