YBa2Cu3O7-x (YBCO) films with wrinkles have been fabricated on LaAlO3(100) substrates by trifluoroacetate metal organic deposition (TFA-MOD). The decomposition behavior of YBCO-TFA gel and the formation mechanism of wrinkles were analyzed by thermal analysis, Fourier transform infrared spectroscopy, and atomic force microscopy. The effects of wrinkles on the texture, microstructure and critical current density of the final crystallized film were also investigated by X-ray diffraction and scanning electron microscopy. The heating rate in the decomposition process was a crucial parameter to control the wavelength and wave amplitude of wrinkles on the surface of YBCO precursor film. Furthermore, the wrinkles of precursor films were transformed into the ridges of crystallized films during the crystallization process. Large ridges resulted in the degradation of texture of YBCO crystallized films. The decrease of critical current density (J(c)) of YBCO crystallized films could be ascribed to the formation of ridges, the segregated phases and the degradation of texture. It suggested that the smooth morphology of YBCO precursor films would be beneficial to the enhancement J(c) value. (C) 2015 Elsevier B.V. All rights reserved.