Organic-inorganic materials have been the object of intense research due to their wide range of properties and therefore innumerous applications. We prepared organic-inorganic hybrid materials by direct energy deposition on a mixture of polydimethylsiloxane silanol terminated (33 wt% fixed content), tetraethylorthosilicate and a minor content of zirconium propoxide that varied from 1 to 5 wt% using gamma radiation from a Co-60 source. The samples, dried in air at room temperature, are bulk, flexible and transparent. Their nanostructure was investigated by small angle neutron scattering. It was found that the inorganic oxide network has fractal structure, which becomes denser as the zirconium propoxide content decreases. The results suggest that oxide nanosized regions grow from the OH terminal group of PDMS which are the condensation seeds. Their number and position remains unaltered with the variation of zirconium propoxide content that only affects their microstructure. A model is proposed for the nanostructure of the oxide network that develops in the irradiation processed hybrid materials. (C) 2015 Elsevier B.V. All rights reserved.