Localized surface plasmon resonance (LSPR) characteristics of gold nanoparticles films grown at different substrate temperatures and mass thicknesses with and without alumina capping were studied. At different film mass thicknesses, the LSPR response was observed mainly in the films grown at high substrate temperatures. About 300 degrees C substrate temperature was found to be optimum for producing narrow and strong LSPR band in both uncapped and alumina capped gold nanoparticles films. The LSPR wavelength could be tuned in the range of 600-750 nm by changing either number of ablation pulses or decreasing target to substrate distance (TSD) and alumina layer capping. Though the alumina capping re-sputtered the gold films still these films exhibited stronger LSPR response compared to the uncapped films. Atomic force microscopic analysis revealed formation of densely packed nanoparticles films exhibiting strong LSPR response which is consistent with the package density of the nanoparticles predicted by the theoretical calculations. The average size of nanoparticles increased with substrate temperature, number of ablation pulses and decreasing the TSD. For the same mass thickness of gold films grown at different substrate temperatures the surface enhanced Raman scattering (SERS) intensity of Rhodamine6G dye was found to be significantly different which had direct correlation with the LSPR strength of the films at the excitation wavelength. (C) 2015 Elsevier B.V. All rights reserved.