Multi-functional (coatings with some additional functional properties such as high transparency, antireflection, hydrophilicity and antifogging) coatings are indispensable for the modern energy saving systems. In this regard, we deposited TiO2/Si/Ag(Cr)/TiNx multilayer thin films on soda-lime glass by using RF and DC magnetron sputtering to achieve a multi-functional thin film stack with the combination low emissivity (low-e) and hydrophilicity properties in addition to the high transparency. Primary deposition of Ag(Cr)/TiNx was tried for the low-e effect and successfully obtained a very low emissivity value of 0.067, and then Si and TiO2 films with different bandgap were subsequently deposited to provide the hydrophilic properties. X-ray diffraction results revealed the anatase phase formation of TiO2 after annealing the films at 673 K by using the rapid thermal annealing system. Rutherford Backscattering Spectrometry (RBS) was carried out to determine the chemical composition and elemental depth distribution. The multilayer stack exhibited superhydrophilicity with a water contact angle of about 5 degrees after irradiation by UV light. A Heterojunction film with wide and narrow bandgap semiconductor materials was effective to improve the hydrophilicity. The films exhibited a high visible transmittance (similar to 85.5%, at 550 nm) and low infrared transmittance (7%, at 2000 nm) including low-e and superhydrophilicity. (C) 2015 Elsevier B.V. All rights reserved.