AIP법으로 형성된 TiAgN 코팅필름의 바이어스전압에 따른 표면 특성 분석

백민숙; 윤동주; 강병모; 정운조; 김병일; Min-Sook Baek; Dong-Joo Yoon; Byeong-Mo Kang; Woon-Jo Jeong; Byung-Il Kim

Korean Journal of Materials Research, Vol.25, No.5, 253-257, May, 2015

DOI10.3740/MRSK.2015.25.5.253 Export Citation

AIP법으로 형성된 TiAgN 코팅필름의 바이어스전압에 따른 표면 특성 분석

Surface Characterization According to the Bias Voltage of the TiAgN Coating Film Layer Formed by the AIP Process

백민숙^†, 윤동주¹, 강병모², 정운조², 김병일

순천대학교 미래전략신소재공학과
¹차세대 전략산업용 희유자원 실용화센터
²(주)오티앤티

Min-Sook Baek^†, Dong-Joo Yoon¹, Byeong-Mo Kang², Woon-Jo Jeong², and Byung-Il Kim

Department of future strategic new Materials Engineering, Sunchon National University, Suncheon 540-742, Korea
¹Center for Practical Use of Rare Materials, Sunchon National University, Suncheon 540-742, Korea
²OT&T, Inc., Gwangju 500-470, Korea

E-mail:

The implanting of metal products is performed with numerous surface treatments because of toxicity and adhesion. Recently, the surface modification of metal products has been actively studied by coating the surface of the TiC or TiN film. We prepared a Ti(10%)Ag Target which may be used in dental oral material by, using the AIP(arc ion plating) system TiAgN coating layer that was deposited on Ti g.23. The purpose of this study was to establish the optimal bias voltage conditions of the coated TiAgN layer formed by the AIP process. The TiAgN coatings were prepared with different bias voltage parameters (0V to .500V) to investigate the effect of bias voltage on their mechanical and chemical properties. The SEM(scanning electron microscope), EDS(energy dispersive X-ray spectrometer), XRD(X-ray diffraction), micro-hardness, and potentiodynamic polarization were measured and the surface characteristics of the TiAgN coating layers were evaluated. The TiAgN coating layer had different mechanical characteristics based on the bias voltage, which also showed differences in thickness and composition.

Keywords:AIP;TiAgN coating;bias voltage;Ti g.23;Ti-(10%)Ag target

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[2] Park KS, et al., Biomater. Tissue Eng. Currnt Trends in Medical Science, 27, 13 (2000)

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[4] Leyens C, Peters M, Titanium and Titanium Alloys, p.423-465, WILEY-VCH Gmbh& Co. KGaA, Germany (2003).

[5] Hyun CY, Huh JK, Lee WH, Korean J. Mater. Res., 16(3), 173 (2005)

[6] Lampe T, Eisenberg S, Laudien G, Surf. Coat. Technol., 9(1), 69 (1993)

[7] Lee JY, Oh DJ, Kim HJ, Chung CH, J. Korean Academy Prosthodontics, 45(7), 675 (2007)

[8] Lee GS, Bae SH, Lee YZ, Korean Soc. Tribology Lubric. Eng., 26(1), 68 (2010)

[9] Carvalho S, Vaz F, Rebouta L, Schneider D, Cavaleiro A, Alves E, Surf. Coat. Technol., 142, 110 (2001)

[10] Sakaki M, Sakakibara T, IEEE Trans. Plasma Sci., 22(6), 1049 (1994)

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[12] Park JJ, Mun SK, Kim KN, J. Korean Soc. Dent. Mater., 37(3), 227 (2010)

[13] Lee JH, Choi YW, Jang SK, Kim SJ, J. Korean Soc. Mar. Eng., 38(7), 890 (2014)

[14] Baik SY, Na EY, J. Korean Soc. Mar. Eng., 27(3), 447 (2003)

[15] Kwon SS, Shin CH, Shin GY, Oral. Biol. Res., 33(1), 36 (2009)

[16] Shew BY, Huang JL, Lii DF, Thin Solid Films, 293(1-2), 212 (1997)

[17] Kal AN, Ravindranath K, Kothari DC, Raole PM, Surf. Coat. Technol., 145, 60 (2001)

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[19] Ri EJ, Hoang TS, J. Korean Int. Surf. Eng., 32(3), 257 (1999)

[20] Kwon SY, Kim MH, Lee HS, Son CH, Kim KH, J. Int. Ind. Tech., 25(1), 161 (1997)

[21] Oh KT, Sim HM, Hwang CJ, Kim KN, J. Korean Soc. Dent. Mater., 29(3), 221 (2002)

[22] Han JH, Lee KH, Shin MC, Analytical Sci. Technol., 9(2), 192 (1996)