Korean Journal of Materials Research, Vol.25, No.2, 100-106, February, 2015
대기압 유전체배리어방전의 발광특성
Optical Emission Characteristics of Atmospheric Pressure Dielectric Barrier Discharge
E-mail:
Plasma properties of dielectric barrier discharges (DBDs) at atmospheric pressure were measured and characterized using optical emission spectroscopy. Optical emissions were measured from argon, nitrogen, or air discharges generated at 5-9 kV using 20 kHz power supply. Emissions from nitrogen molecules were markedly measured, irrespective of discharge gases. The intensity of emission peaks was increased with applied voltage and electrode gap. The short wavelength peaks (315.9 nm and 337.1 nm) measured at the middle of DBDs were significantly increased with applied voltage. The optical emission from DBDs decreased with the addition of oxygen gas, which was especially significant in argon discharge. Emission from oxygen molecules cannot be measured from air discharge and argon discharge with 4.8% oxygen. The emission intensity at 337.1 nm and 357.7 nm related with nitrogen molecule was sensitively changed with electrode types and discharge voltages. However, the pattern of argon emission spectrum was nearly the same, irrespective of electrode type, oxygen content, and discharge voltage.
- Grill A, Cold Plasma in Materials Fabrication, IEEE press Inc., New York, (1989).
- Jitsomboonmit P, Nisoa M, Dangtip S, Physics Procedia, 32, 723 (2012)
- Yang D, Wang W, Wang K, Liu F, Wang D, Spectroc. Acta Pt. A-Molec. Biomolec. Spectr., 76, 224 (2010)
- Li W, Jiang X, Xu K, Hou X, Zheng C, Microchem J., 99, 114 (2011)
- Mecke R, Lindau P, Phys. Zeit., 25, 277 (1924)
- Coster D, Brons H, van der Ziel A, Z. P., 84, 304 (1933).
- Tyte DC, Nicholls RW, Identification Atlas of Molecular Spectra, 2 Univ. Western Ontario (1964).